신소재공학과

Seminar

Date 20171124 

■ Title : Low Temperature Crystallization of Si films for TFTs by Laser Annealing on Panels

 

■ Speaker : Takashi NOGUCHI  (University of the Ryukyus)


■ Date and time : 24th of November, 2017 (Fri) 14:00

 

■ Venue : Applied Engineering Dpt. Bd W1-1 Room 1318

 

■ Host  : Prof. Sang-Hee Park

 

■ Abstract : Laser Crystallizations using Blue Laser-Diodes Annealing (BLDA) as well as conventional Excimer Laser Annealing (ELA) are presented for mounting the TFTs on panels. On glass, high crystallinity of Si films can be obtained by using multi-shots ELA as well as CW laser scanning. In term of lower temperature TFT process on flexible plastic sheets, pulsed ELA of UV light is faborable. However, there are some issues after ELA. As a result of BLDA scanning for thin Si films, remarkable crystallization occurs with keeping the surface smooth not only for CVD film but also for sputtered Si film [5]. By changing the laser power of 445 nm beam, the grain size can be controlled from micro-grains to large grains as well as to anisotropic long crystal grains. For the Si films of heavily phosphorus doped condition, the resistivity decreased drastically after BLDA as well as after multi-shots ELAIn order to perform low temperature TFT process, metal source/drain (S/D)structure without using impurity doping is proposed for TFTs with low fabrication cost on panel. 

No. Subject Author Date Views
Notice 5/15 (Tue) Prof. Myung Gil Kim (Dept. of Chemistry, Chung-Ang Univ.) ADMINI 2018.05.15 156
Notice 5/8 (Tue) Prof. Ju-Young Kim (UNIST MSE) ADMINI 2018.05.09 220
Notice 5/1 (Tue) Prof. Duk-Yong Yoon (KAIST MSE) ADMINI 2018.04.30 401
Notice 4/24 (Tue) Kyeong Ho Chang (CEO, Innox Advanced Materials) ADMINI 2018.04.23 423
Notice 4/10 (Tue) Prof. Ki Jun, Yu (Yonsei Univ., School of Electrical and Electronic Engineering) ADMINI 2018.04.09 513
Notice 4/3 (Tue) Master Byung-Gi Choi (Samsung Advanced Institute of Technology) ADMINI 2018.04.02 431
Notice 3/27 (Tue) Prof. Seungbum Hong (KAIST MSE) ADMINI 2018.03.26 402
Notice 3/20 (Tue) Prof. Jung In-Ho (Seoul National University, MSE) ADMINI 2018.03.20 269
Notice 3/13 (Tue) Prof. Jong-Beom Baek (School of Energy and Chemical Engineering, UNIST) ADMINI 2018.03.13 266
Notice 3/6 (Tue) Prof. Seok-Young Ryu (KAIST CS) ADMINI 2018.03.05 237
Notice 2/27 (Tue) Dr. Jin-Woo Han (NASA) ADMINI 2018.02.27 291
Notice 2/20 (Tue) Dr. Jae Beom Jang (Sungkyunkwan Univ) ADMINI 2018.02.19 262
Notice 2/8 (Thu) Prof. Pei-Chen Su (Nanyang Technological University) ADMINI 2018.02.05 267
Notice 2/13 (Tue) Prof. Sungkyu Kim (Northwestern Univ) ADMINI 2018.01.31 339
Notice 1/9 (Tue) Dr. Choon Won Byeon, ETRI ADMINI 2018.01.09 372
Notice 12/23 (Sat) Prof. Liangbing (Bing) Hu/Univ. of Maryland ADMINI 2017.12.22 392
Notice 2017 The Fall Semester Seminar ADMINI 2017.09.08 2903
246 11/28 (Tue) Dr. Woo-Jin Lee (Ministry of Science and ICT.) ADMINI 2017.11.24 1082
» 11/24 (Fri) Takashi NOGUCH (University of the Ryukyus) ADMINI 2017.11.23 748
244 11/21 (Tue) Dr. Young Ki Lee (ETRI) file ADMINI 2017.11.20 984
243 11/22 (Wed) Prof. Sung Hoon Kang (Johns Hopkins University) file ADMINI 2017.11.20 1216