= 아 래 =
1. 일 시 : 2012. 7. 11 (수), 14:00 ~
2. 장 소 : 응용공학동 영상강의실
3. 연 사 : Prof. Caroline A. Ross (MIT)
4. 제 목 : Templated Block Copolymers for Nanolithography
The self-assembly of block copolymer films produces periodic nanoscale patterns and has been proposed as a method for extending microelectronic fabrication beyond the limits of optical lithography to create few-nm feature sizes, in a process that can be accomplished rapidly and at low cost. I will describe the thermal and solvent annealing needed to produce a range of microdomain morphologies in the films. To make patterns with long range order, as well as patterns with designed aperiodic features, we have developed templating strategies based on substrate topography to control the self-assembly. The production and templating of more complex patterns from triblock terpolymers, such as arrays of rings or square-symmetry posts, will be described. Examples of pattern transfer to metals, magnetic films, oxides and polymer and device fabrication will be described.