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Seminar

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Date 20181127

MSE Regular Seminar



■ Title :  Nanoengineering of Functional Nanomaterials

           

■ Speaker :  Prof. Seong-Jun Jeong (Soongsil Univ.)  

 

■ Date and Time :  11/27 (Tue) 16:00


■ Venue :  Applied Engineering Building (W1) 1st floor, Multimedia Lecture Room

 

 Host :  Prof. Sang-Ouk Kim  

 

 Abstract : 

In this talk, I will introduce the recent progress in the development of the directed self-assembly (DSA) process for practical utilization in semiconductor applications [1]. Furthermore, I will present a novel method for fabrication large-area field effect transistors (FETs) based on densely packed multi-channel graphene nanoribbon (GNR) arrays using advanced DSA nanolithography. The design of our strategy focused on efficient integration of the FET channel and fab-compatible processes such as thermal annealing and chemical vapor deposition [2]. Finally, I’ll introduce a reliable and robust gate dielectric material with tunable dielectric constants based on a mesostructured HfxAlyO2 film. The ultrathin mesostructured HfxAlyO2 film is deposited on graphene via a physisorbed-precursor-assisted atomic layer deposition process and consists of an intermediate state with small crystallized parts in an amorphous matrix. Crystal phased engineering using Al dopant is employed to achieve HfO2 phase transitions, which produce the crystallized part of the mesostructured HfxAlyO2 film. The effects of various Al doping concentrations are examined, and an enhanced dielectric constant of ~25 is obtained [3].

 Reference

[1] Jeong et al. Materials Today 16(12), 468–476, 2014

[2] Jeong et al. Nano Letters 16 (9), pp 5378–5385, 2016

[3] Jeong et al. ACS Nano 10 (7), pp 6659–6666, 2016


List of Articles
No. Category Subject Author Date Views
Notice Regular 12/4 (Tue) Prof. Doo Seok Jeong (Hanyang Univ., Department of MSE) ADMINI 2018.11.30 127
» Regular 11/27 (Tue) Prof. Seong-Jun Jeong (Soongsil Univ.) ADMINI 2018.11.26 126
Notice Regular 11/20 (Tue) Prof. Youn Soo Kim (Department of MSE, POSTECH) ADMINI 2018.11.19 183
Notice Special 11/14 (Wed) Prof. Hui-Ming Cheng (Director and Professor, Tsinghua University, IMR CAS) ADMINI 2018.11.13 160
Notice Special 11/20 (Tue) Prof. Alfonso H. W. Ngan (Department of Mechanical Engineering, University of Hong Kong) file ADMINI 2018.11.13 174
Notice Regular 11/13 (Tue) Dr. Kang-Wook Lee (SK Hynix) ADMINI 2018.11.13 106
Notice Regular 11/6 (Tue) Prof. Dongchan Jang (KAIST NQE) ADMINI 2018.11.02 179
Notice Special 11/2 (Fri) Dr. Sungbong Park (Intel Corporation) ADMINI 2018.10.30 208
276 Regular 10/30 (Tue) Dr. Myung-Il Park (Korea Technology Finance Corporation) ADMINI 2018.10.26 136
275 Regular 10/23 (Tue) Dr. Sang-Soo Han (H&P International Patent & Law Office) ADMINI 2018.10.19 126
274 Regular 10/2 (Tue) Prof. Dohwan Kim (Hanyang Univ.) ADMINI 2018.10.01 283
273 Regular 9/18 (Tue) Prof. Seong Jun Kang (Kyung Hee Univ.) ADMINI 2018.09.17 371
272 Regular 9/11 (Tue) Dr. Byeongdu Lee (Argonne National Laboratory) ADMINI 2018.09.07 458
271 Regular 9/4 (Tue) Prof. Kibum Kang (Department of MSE, KAIST) ADMINI 2018.09.03 446
270 Regular 8/28 (Tue) Prof. Kyung-Min Kim (Department of MSE, KAIST) ADMINI 2018.08.24 525
269 Special 8/24 (Fri) Prof. Joel W. Ager III (UC Berkeley, Lawrence Berkeley National Laboratory) file ADMINI 2018.08.20 404
268 Special 8/23 (Thu) Prof. Jeehwan Kim (MIT, USA) file ADMINI 2018.08.20 346
267 Special 8/23 (Thu) Prof. YANGUANG LI (Soochow University) file ADMINI 2018.08.20 236
266 Special 7/25 (Wed) Dr. Chang Sub Kim (Department of MSE, MIT) ADMINI 2018.07.24 465
265 Special 7/13 (Fri) Prof. Dong Ryeol Whang (Johannes Kepler University Linz, Austria) file ADMINI 2018.07.09 440
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