신소재공학과

Seminar

Extra Form
Date 20171124

■ Title : Low Temperature Crystallization of Si films for TFTs by Laser Annealing on Panels

 

■ Speaker : Takashi NOGUCHI  (University of the Ryukyus)


■ Date and time : 24th of November, 2017 (Fri) 14:00

 

■ Venue : Applied Engineering Dpt. Bd W1-1 Room 1318

 

■ Host  : Prof. Sang-Hee Park

 

■ Abstract : Laser Crystallizations using Blue Laser-Diodes Annealing (BLDA) as well as conventional Excimer Laser Annealing (ELA) are presented for mounting the TFTs on panels. On glass, high crystallinity of Si films can be obtained by using multi-shots ELA as well as CW laser scanning. In term of lower temperature TFT process on flexible plastic sheets, pulsed ELA of UV light is faborable. However, there are some issues after ELA. As a result of BLDA scanning for thin Si films, remarkable crystallization occurs with keeping the surface smooth not only for CVD film but also for sputtered Si film [5]. By changing the laser power of 445 nm beam, the grain size can be controlled from micro-grains to large grains as well as to anisotropic long crystal grains. For the Si films of heavily phosphorus doped condition, the resistivity decreased drastically after BLDA as well as after multi-shots ELAIn order to perform low temperature TFT process, metal source/drain (S/D)structure without using impurity doping is proposed for TFTs with low fabrication cost on panel. 


List of Articles
No. Category Subject Author Date Views
Notice Regular 12/4 (Tue) Prof. Doo Seok Jeong (Hanyang Univ., Department of MSE) ADMINI 2018.11.30 106
Notice Regular 11/27 (Tue) Prof. Seong-Jun Jeong (Soongsil Univ.) ADMINI 2018.11.26 108
Notice Regular 11/20 (Tue) Prof. Youn Soo Kim (Department of MSE, POSTECH) ADMINI 2018.11.19 164
Notice Special 11/14 (Wed) Prof. Hui-Ming Cheng (Director and Professor, Tsinghua University, IMR CAS) ADMINI 2018.11.13 140
Notice Special 11/20 (Tue) Prof. Alfonso H. W. Ngan (Department of Mechanical Engineering, University of Hong Kong) file ADMINI 2018.11.13 151
Notice Regular 11/13 (Tue) Dr. Kang-Wook Lee (SK Hynix) ADMINI 2018.11.13 104
Notice Regular 11/6 (Tue) Prof. Dongchan Jang (KAIST NQE) ADMINI 2018.11.02 177
Notice Special 11/2 (Fri) Dr. Sungbong Park (Intel Corporation) ADMINI 2018.10.30 206
264 Regular 6/5 (Tue) Prof. Sunghwan Lee (Baylor University) ADMINI 2018.06.05 601
263 Regular 5/29 (Tue) Prof. Sang Ho Oh (Yonsei Univ. College of Medicine) ADMINI 2018.05.29 583
262 Regular 5/15 (Tue) Prof. Myung Gil Kim (Dept. of Chemistry, Chung-Ang Univ.) ADMINI 2018.05.15 792
261 Regular 5/8 (Tue) Prof. Ju-Young Kim (UNIST MSE) ADMINI 2018.05.09 706
260 Regular 5/1 (Tue) Prof. Duk-Yong Yoon (KAIST MSE) ADMINI 2018.04.30 1165
259 Regular 4/24 (Tue) Kyeong Ho Chang (CEO, Innox Advanced Materials) ADMINI 2018.04.23 734
258 Regular 4/10 (Tue) Prof. Ki Jun, Yu (Yonsei Univ., School of Electrical and Electronic Engineering) ADMINI 2018.04.09 807
257 Regular 4/3 (Tue) Master Byung-Gi Choi (Samsung Advanced Institute of Technology) ADMINI 2018.04.02 690
256 Regular 3/27 (Tue) Prof. Seungbum Hong (KAIST MSE) ADMINI 2018.03.26 643
255 Regular 3/20 (Tue) Prof. Jung In-Ho (Seoul National University, MSE) ADMINI 2018.03.20 543
254 Regular 3/13 (Tue) Prof. Jong-Beom Baek (School of Energy and Chemical Engineering, UNIST) ADMINI 2018.03.13 509
253 Regular 3/6 (Tue) Prof. Seok-Young Ryu (KAIST CS) ADMINI 2018.03.05 431
252 Regular 2/27 (Tue) Dr. Jin-Woo Han (NASA) ADMINI 2018.02.27 494
251 Special 2/20 (Tue) Dr. Jae Beom Jang (Sungkyunkwan Univ) ADMINI 2018.02.19 452
250 Special 2/8 (Thu) Prof. Pei-Chen Su (Nanyang Technological University) file ADMINI 2018.02.05 458
249 Special 2/13 (Tue) Prof. Sungkyu Kim (Northwestern Univ) ADMINI 2018.01.31 523
248 Special 1/9 (Tue) Dr. Choon Won Byeon, ETRI ADMINI 2018.01.09 525
247 12/23 (Sat) Prof. Liangbing (Bing) Hu/Univ. of Maryland file ADMINI 2017.12.22 541
246 Regular 11/28 (Tue) Dr. Woo-Jin Lee (Ministry of Science and ICT.) ADMINI 2017.11.24 1184
» Special 11/24 (Fri) Takashi NOGUCH (University of the Ryukyus) ADMINI 2017.11.23 850
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