신소재공학과

행사일 20171124 

■ 제      : Low Temperature Crystallization of Si films for TFTs by Laser Annealing on Panels

 

■ 연      : Takashi NOGUCHI  (University of the Ryukyus)


■ 일      : 2017년 11월 24일(금) 오후 2시

 

■ 장      :응용공학동 (W1-1) 1318강의실 (1318호)

 

■ H o s t  : 박상희 교수

 

■ Abstract : Laser Crystallizations using Blue Laser-Diodes Annealing (BLDA) as well as conventional Excimer Laser Annealing (ELA) are presented for mounting the TFTs on panels. On glass, high crystallinity of Si films can be obtained by using multi-shots ELA as well as CW laser scanning. In term of lower temperature TFT process on flexible plastic sheets, pulsed ELA of UV light is faborable. However, there are some issues after ELA. As a result of BLDA scanning for thin Si films, remarkable crystallization occurs with keeping the surface smooth not only for CVD film but also for sputtered Si film [5]. By changing the laser power of 445 nm beam, the grain size can be controlled from micro-grains to large grains as well as to anisotropic long crystal grains. For the Si films of heavily phosphorus doped condition, the resistivity decreased drastically after BLDA as well as after multi-shots ELAIn order to perform low temperature TFT process, metal source/drain (S/D)structure without using impurity doping is proposed for TFTs with low fabrication cost on panel. 

No. Subject Author Date Views
Notice 7/25 (Wed) 김창섭 박사 (Department of MSE, MIT) ADMINI 2018.07.24 16
Notice 7/13 (Fri) Prof. Dong Ryeol Whang (Johannes Kepler University Linz,Austria) ADMINI 2018.07.09 13
Notice 6/5 (Tue) 이성환 교수 (Baylor University) ADMINI 2018.06.05 54
Notice 5/29 (Tue) 오상호 교수 (연세대학교 의과대학 피부과학교실) ADMINI 2018.05.29 51
Notice 5/15 (Tue) 김명길 교수 (중앙대 화학과) ADMINI 2018.05.15 93
252 11/28 (Tue) 이우진 서기관 (과학기술정보통신부) ADMINI 2017.11.24 575
» 11/24 (Fri) Takashi NOGUCH (University of the Ryukyus) ADMINI 2017.11.23 359
250 11/21 (Tue) 이영기 박사 (한국전자통신연구원) file ADMINI 2017.11.20 525
249 11/22 (Wed) 강성훈 교수 (Johns Hopkins Unviersity) file ADMINI 2017.11.20 574
248 11/21 (Tue) 민병권 센터장 (한국과학기술연구원) ADMINI 2017.11.17 715
247 11/13 (Mon) Dr. Hans Aage Hiuler (Danish Power System) ADMINI 2017.11.10 188
246 11/13 (Mon) Prof. Jens Oluf Jensen (Technical University of Denmark) ADMINI 2017.11.10 292
245 11/14 (Tue) 장재범 교수 (성균관대학교) ADMINI 2017.11.10 326
244 11/7 (Tue) 허수미 교수 (전남대학교 ADMINI 2017.11.05 215
243 10/31 (Tue) 장세영 상무 (삼성전자) ADMINI 2017.10.26 206
242 11/6 (Mon) Redouane Borsali 교수 (Grenoble Alpes University) ADMINI 2017.10.26 196
241 11/6 ~ 7 Erik Luijten 교수 (Northwestern University) file ADMINI 2017.10.25 229
240 10/23 ~ 24 Paul C. McIntyre 교수 (Stanford University) file ADMINI 2017.10.25 174
239 10/24 (Tue) 김선재 교수 (세종대학교) ADMINI 2017.10.20 547
238 10/19 (Thu) 정상철 교수 (순천대학교) ADMINI 2017.10.18 956
237 10/10 (Tue) 최 주 원장 (POSCO) ADMINI 2017.09.29 1265
236 9/26 (Tue) 이태우 교수 (서울대학교) ADMINI 2017.09.22 541
235 9/19 (Tue) 이상민 의원 (국회의원) ADMINI 2017.09.15 664
234 9/12 (Tue) Monika Fleischer(Eberhard Karls University Tübingen) ADMINI 2017.09.14 337
233 2017 신소재공학과 가을학기 정기세미나 file ADMINI 2017.09.08 1893