신소재공학과

Seminar

Extra Form
Date 20171124

■ Title : Low Temperature Crystallization of Si films for TFTs by Laser Annealing on Panels

 

■ Speaker : Takashi NOGUCHI  (University of the Ryukyus)


■ Date and time : 24th of November, 2017 (Fri) 14:00

 

■ Venue : Applied Engineering Dpt. Bd W1-1 Room 1318

 

■ Host  : Prof. Sang-Hee Park

 

■ Abstract : Laser Crystallizations using Blue Laser-Diodes Annealing (BLDA) as well as conventional Excimer Laser Annealing (ELA) are presented for mounting the TFTs on panels. On glass, high crystallinity of Si films can be obtained by using multi-shots ELA as well as CW laser scanning. In term of lower temperature TFT process on flexible plastic sheets, pulsed ELA of UV light is faborable. However, there are some issues after ELA. As a result of BLDA scanning for thin Si films, remarkable crystallization occurs with keeping the surface smooth not only for CVD film but also for sputtered Si film [5]. By changing the laser power of 445 nm beam, the grain size can be controlled from micro-grains to large grains as well as to anisotropic long crystal grains. For the Si films of heavily phosphorus doped condition, the resistivity decreased drastically after BLDA as well as after multi-shots ELAIn order to perform low temperature TFT process, metal source/drain (S/D)structure without using impurity doping is proposed for TFTs with low fabrication cost on panel. 


List of Articles
No. Category Subject Author Date Views
Notice Regular 10/2 (Tue) Prof. Dohwan Kim (Hanyang Univ.) ADMINI 2018.10.01 156
Notice Regular 9/18 (Tue) Prof. Seong Jun Kang (Kyung Hee Univ.) ADMINI 2018.09.17 276
Notice Regular 9/11 (Tue) Dr. Byeongdu Lee (Argonne National Laboratory) ADMINI 2018.09.07 358
Notice Regular 9/4 (Tue) Prof. Kibum Kang (Department of MSE, KAIST) ADMINI 2018.09.03 362
Notice Regular 8/28 (Tue) Prof. Kyung-Min Kim (Department of MSE, KAIST) ADMINI 2018.08.24 387
Notice Special 8/24 (Fri) Prof. Joel W. Ager III (UC Berkeley, Lawrence Berkeley National Laboratory) file ADMINI 2018.08.20 341
254 Regular 3/13 (Tue) Prof. Jong-Beom Baek (School of Energy and Chemical Engineering, UNIST) ADMINI 2018.03.13 488
253 Regular 3/6 (Tue) Prof. Seok-Young Ryu (KAIST CS) ADMINI 2018.03.05 417
252 Regular 2/27 (Tue) Dr. Jin-Woo Han (NASA) ADMINI 2018.02.27 477
251 Special 2/20 (Tue) Dr. Jae Beom Jang (Sungkyunkwan Univ) ADMINI 2018.02.19 439
250 Special 2/8 (Thu) Prof. Pei-Chen Su (Nanyang Technological University) file ADMINI 2018.02.05 431
249 Special 2/13 (Tue) Prof. Sungkyu Kim (Northwestern Univ) ADMINI 2018.01.31 509
248 Special 1/9 (Tue) Dr. Choon Won Byeon, ETRI ADMINI 2018.01.09 517
247 12/23 (Sat) Prof. Liangbing (Bing) Hu/Univ. of Maryland file ADMINI 2017.12.22 533
246 Regular 11/28 (Tue) Dr. Woo-Jin Lee (Ministry of Science and ICT.) ADMINI 2017.11.24 1170
» Special 11/24 (Fri) Takashi NOGUCH (University of the Ryukyus) ADMINI 2017.11.23 830
244 Special 11/21 (Tue) Dr. Young Ki Lee (ETRI) file ADMINI 2017.11.20 1022
243 Special 11/22 (Wed) Prof. Sung Hoon Kang (Johns Hopkins University) file ADMINI 2017.11.20 1249
242 Regular 11/21 (Tue) Dr. Byoung Koun Min, (KIST) ADMINI 2017.11.17 1392
241 Special 11/13 (Mon) Dr. Hans Aage Hiuler (Danish Power System) ADMINI 2017.11.10 738
240 Special 11/13 (Mon) Prof. Jens Oluf Jensen (Technical University of Denmark) ADMINI 2017.11.10 742
239 Regular 11/14 (Tue) Prof. Jae-Byum Chang (Sungkyunkwan Univ) ADMINI 2017.11.10 743
238 Regular 11/7 (Tue) Prof. Su-Mi Hur (Chonnam National University) ADMINI 2017.11.05 565
237 Regular 10/31 (Tue) Director Jang Sae Young (Samsung Electronics) ADMINI 2017.10.26 585
236 Special 11/6 (Mon) Prof. Redouane Borsali (Grenoble Alpes University) ADMINI 2017.10.26 675
235 Special 11/6 ~ 7 Prof. Erik Luijten (Northwestern University) file ADMINI 2017.10.25 620
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