신소재공학과

Seminar

Extra Form
Date 20171124

■ Title : Low Temperature Crystallization of Si films for TFTs by Laser Annealing on Panels

 

■ Speaker : Takashi NOGUCHI  (University of the Ryukyus)


■ Date and time : 24th of November, 2017 (Fri) 14:00

 

■ Venue : Applied Engineering Dpt. Bd W1-1 Room 1318

 

■ Host  : Prof. Sang-Hee Park

 

■ Abstract : Laser Crystallizations using Blue Laser-Diodes Annealing (BLDA) as well as conventional Excimer Laser Annealing (ELA) are presented for mounting the TFTs on panels. On glass, high crystallinity of Si films can be obtained by using multi-shots ELA as well as CW laser scanning. In term of lower temperature TFT process on flexible plastic sheets, pulsed ELA of UV light is faborable. However, there are some issues after ELA. As a result of BLDA scanning for thin Si films, remarkable crystallization occurs with keeping the surface smooth not only for CVD film but also for sputtered Si film [5]. By changing the laser power of 445 nm beam, the grain size can be controlled from micro-grains to large grains as well as to anisotropic long crystal grains. For the Si films of heavily phosphorus doped condition, the resistivity decreased drastically after BLDA as well as after multi-shots ELAIn order to perform low temperature TFT process, metal source/drain (S/D)structure without using impurity doping is proposed for TFTs with low fabrication cost on panel. 


List of Articles
No. Category Subject Author Date Views
Notice Special 1/28 (Mon) Prof. Yongjin Lee (Shanghai Tech Univ.) ADMINI 2019.01.23 246
Notice Regular 12/4 (Tue) Prof. Doo Seok Jeong (Hanyang Univ., Department of MSE) ADMINI 2018.11.30 585
Notice Regular 11/27 (Tue) Prof. Seong-Jun Jeong (Soongsil Univ.) ADMINI 2018.11.26 503
Notice Regular 11/20 (Tue) Prof. Youn Soo Kim (Department of MSE, POSTECH) ADMINI 2018.11.19 555
Notice Special 11/14 (Wed) Prof. Hui-Ming Cheng (Director and Professor, Tsinghua University, IMR CAS) ADMINI 2018.11.13 392
Notice Special 11/20 (Tue) Prof. Alfonso H. W. Ngan (Department of Mechanical Engineering, University of Hong Kong) file ADMINI 2018.11.13 592
» Special 11/24 (Fri) Takashi NOGUCH (University of the Ryukyus) ADMINI 2017.11.23 866
244 Special 11/21 (Tue) Dr. Young Ki Lee (ETRI) file ADMINI 2017.11.20 1038
243 Special 11/22 (Wed) Prof. Sung Hoon Kang (Johns Hopkins University) file ADMINI 2017.11.20 1275
242 Regular 11/21 (Tue) Dr. Byoung Koun Min, (KIST) ADMINI 2017.11.17 1447
241 Special 11/13 (Mon) Dr. Hans Aage Hiuler (Danish Power System) ADMINI 2017.11.10 1443
240 Special 11/13 (Mon) Prof. Jens Oluf Jensen (Technical University of Denmark) ADMINI 2017.11.10 781
239 Regular 11/14 (Tue) Prof. Jae-Byum Chang (Sungkyunkwan Univ) ADMINI 2017.11.10 752
238 Regular 11/7 (Tue) Prof. Su-Mi Hur (Chonnam National University) ADMINI 2017.11.05 591
237 Regular 10/31 (Tue) Director Jang Sae Young (Samsung Electronics) ADMINI 2017.10.26 611
236 Special 11/6 (Mon) Prof. Redouane Borsali (Grenoble Alpes University) ADMINI 2017.10.26 766
235 Special 11/6 ~ 7 Prof. Erik Luijten (Northwestern University) file ADMINI 2017.10.25 636
234 Special 10/23 ~ 24 Prof. Paul C. McIntyre (Stanford University) file ADMINI 2017.10.25 564
233 Regular 10/24 (Tue) Prof. Sun-Jae Kim (Sejong, Univ) ADMINI 2017.10.20 1002
232 Special 10/19 (Thu) Prof. Sang Cheol, Jung (Suncheon University) ADMINI 2017.10.18 1326
231 Regular 10/10 (Tue) Dr. Joo Choi (POSCO) ADMINI 2017.09.29 2248
230 Regular 9/26 (Tue) Prof. Tae-Woo Lee (Seoul National University) ADMINI 2017.09.22 1480
229 Regular 9/19 (Tue) Representative Sang Min Lee (Congressman) ADMINI 2017.09.15 1226
228 Special 9/12 (Tue) Monika Fleischer(Eberhard Karls University Tübingen) ADMINI 2017.09.14 839
227 Regular 2017 The Fall Semester Seminar file ADMINI 2017.09.08 3003
226 Regular 9/12 (Tue) Prof. Pil Jin, Yoo (Sungkyunkwan Univ) ADMINI 2017.09.08 1361
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