신소재공학과

Seminar

Date 20171124 

■ Title : Low Temperature Crystallization of Si films for TFTs by Laser Annealing on Panels

 

■ Speaker : Takashi NOGUCHI  (University of the Ryukyus)


■ Date and time : 24th of November, 2017 (Fri) 14:00

 

■ Venue : Applied Engineering Dpt. Bd W1-1 Room 1318

 

■ Host  : Prof. Sang-Hee Park

 

■ Abstract : Laser Crystallizations using Blue Laser-Diodes Annealing (BLDA) as well as conventional Excimer Laser Annealing (ELA) are presented for mounting the TFTs on panels. On glass, high crystallinity of Si films can be obtained by using multi-shots ELA as well as CW laser scanning. In term of lower temperature TFT process on flexible plastic sheets, pulsed ELA of UV light is faborable. However, there are some issues after ELA. As a result of BLDA scanning for thin Si films, remarkable crystallization occurs with keeping the surface smooth not only for CVD film but also for sputtered Si film [5]. By changing the laser power of 445 nm beam, the grain size can be controlled from micro-grains to large grains as well as to anisotropic long crystal grains. For the Si films of heavily phosphorus doped condition, the resistivity decreased drastically after BLDA as well as after multi-shots ELAIn order to perform low temperature TFT process, metal source/drain (S/D)structure without using impurity doping is proposed for TFTs with low fabrication cost on panel. 

No. Subject Author Date Views
Notice 7/13 (Fri) Prof. Dong Ryeol Whang (Johannes Kepler University Linz, Austria) ADMINI 2018.07.09 64
Notice 6/5 (Tue) Prof. Sunghwan Lee (Baylor University) ADMINI 2018.06.05 270
Notice 5/29 (Tue) Prof. Sang Ho Oh (Yonsei Univ. College of Medicine) ADMINI 2018.05.29 270
Notice 5/15 (Tue) Prof. Myung Gil Kim (Dept. of Chemistry, Chung-Ang Univ.) ADMINI 2018.05.15 489
265 2015 The Fall Semester Seminar file TeamLeader 2015.03.04 18985
264 2/25 (월) 홍승범박사 (Argonne National Laboratory) Administrator 2013.02.06 17971
263 [공지] 2011년 가을학기 신소재공학과 정기세미나 안내 file Administrator 2011.11.04 15317
262 3/20 (화) 정우철 박사 (California Institute of Technology) file Administrator 2012.03.15 15302
261 [공지] 2012년 봄학기 신소재공학과 정기세미나 안내 file Administrator 2012.02.13 14416
260 5/15 (화) 조문호 교수 (연세대학교 신소재공학과) Administrator 2012.05.09 13994
259 9/6 (화) 남윤성 교수 (KAIST 신소재공학과) file Administrator 2011.11.04 13961
258 [WCU-FS 사업단 세미나] 6/7 (화) 조정대 박사 (한국기계연구원) Administrator 2011.11.04 13543
257 10/19 (수) Dr. Miso Kim (MIT) Administrator 2011.11.04 11790
256 10/16 (화) 유현용 교수 (고려대학교 전기전자전파공학부) Administrator 2012.10.12 11760
255 3/19 (화) 신병하 박사 (IBM T.J. Watson Research Center) Administrator 2013.03.19 11486
254 10/11 (화) 조성준 교수 (전남대학교 응용화학공학부 file Administrator 2011.11.04 11370
253 10/18 (화) 이윤정 교수 (한양대학교 WCU, 에너지공학과) file Administrator 2011.11.04 11348
252 11/15 (화) 김진웅 교수 (한양대학교 응용화학과) file Administrator 2011.12.05 11260
251 11/1 (화) 윤명한 교수 (광주과학기술원 신소재공학부) file Administrator 2011.11.04 11258
250 3/5 (화) 정우철 교수 (KAIST 신소재공학과) Administrator 2013.03.05 11247
249 2/14 (화) 신종화 교수 (KAIST 신소재공학과) file Administrator 2012.02.15 11187
248 12/13 (화) Prof. Aloysius Soon (연세대학교 신소재공학과) file Administrator 2011.12.07 10717
247 [WCU-FS 사업단 세미나] 6/29 (수) 16:00 Prof. Digby D. Macdonald (Pennsylvania State University) Administrator 2011.11.04 10487
246 4/19 (화) 남기태 교수 (서울대학교 재료공학부) Administrator 2011.11.04 10411