신소재공학과

행사일 20171124 

■ 제      : Low Temperature Crystallization of Si films for TFTs by Laser Annealing on Panels

 

■ 연      : Takashi NOGUCHI  (University of the Ryukyus)


■ 일      : 2017년 11월 24일(금) 오후 2시

 

■ 장      :응용공학동 (W1-1) 1318강의실 (1318호)

 

■ H o s t  : 박상희 교수

 

■ Abstract : Laser Crystallizations using Blue Laser-Diodes Annealing (BLDA) as well as conventional Excimer Laser Annealing (ELA) are presented for mounting the TFTs on panels. On glass, high crystallinity of Si films can be obtained by using multi-shots ELA as well as CW laser scanning. In term of lower temperature TFT process on flexible plastic sheets, pulsed ELA of UV light is faborable. However, there are some issues after ELA. As a result of BLDA scanning for thin Si films, remarkable crystallization occurs with keeping the surface smooth not only for CVD film but also for sputtered Si film [5]. By changing the laser power of 445 nm beam, the grain size can be controlled from micro-grains to large grains as well as to anisotropic long crystal grains. For the Si films of heavily phosphorus doped condition, the resistivity decreased drastically after BLDA as well as after multi-shots ELAIn order to perform low temperature TFT process, metal source/drain (S/D)structure without using impurity doping is proposed for TFTs with low fabrication cost on panel. 

No. Subject Author Date Views
Notice 5/15 (Tue) 김명길 교수 (중앙대 화학과) ADMINI 2018.05.15 22
Notice 5/8 (Tue) 김주영 교수 (UNIST 신소재공학부) ADMINI 2018.05.09 23
Notice 5/1 (Tue) 윤덕용 명예교수 (KAIST 신소재공학과) ADMINI 2018.04.30 28
Notice 4/24 (Tue) 장경호 대표이사 (이녹스첨단소재, Innox Advanced Materials) ADMINI 2018.04.23 43
Notice 4/10 (Tue) 유기준 교수 (연세대학교 전기전자공학부) ADMINI 2018.04.09 93
Notice 4/3 (Tue) 최병기 마스터 (삼성전자종합기술원) ADMINI 2018.04.02 94
Notice 3/27 (Tue) 홍승범 교수 (KAIST MSE) ADMINI 2018.03.26 115
Notice 3/20 (Tue) 정인호 교수 (서울대학교 재료공학부) ADMINI 2018.03.20 122
Notice 3/13 (Tue) 백종범 교수 (School of Energy and Chemical Engineering, UNIST) ADMINI 2018.03.13 110
Notice 3/6 (Tue) 류석영 교수 (KAIST 전산학부) ADMINI 2018.03.05 118
Notice 2/27 (Tue) 한우진 박사 (NASA) ADMINI 2018.02.27 152
Notice 2/20 (Tue) 장재범 박사 (성균관대학) ADMINI 2018.02.19 148
Notice 2/8 (Thu) Prof. Pei-Chen Su (Nanyang Technological University) ADMINI 2018.02.05 139
Notice 2/13 (Tue) 김성규 교수 (Northwestern Univ) ADMINI 2018.01.31 162
Notice 1/9 (Tue) 변춘원 선임연구원 (ETRI) ADMINI 2018.01.09 164
Notice 12/23 (Sat) Prof. Liangbing (Bing) Hu/Univ. of Maryland ADMINI 2017.12.22 164
Notice 2017 신소재공학과 가을학기 정기세미나 ADMINI 2017.09.08 1868
252 11/28 (Tue) 이우진 서기관 (과학기술정보통신부) ADMINI 2017.11.24 552
» 11/24 (Fri) Takashi NOGUCH (University of the Ryukyus) ADMINI 2017.11.23 343
250 11/21 (Tue) 이영기 박사 (한국전자통신연구원) file ADMINI 2017.11.20 512
249 11/22 (Wed) 강성훈 교수 (Johns Hopkins Unviersity) file ADMINI 2017.11.20 561