신소재공학과

Seminar

Date 20171124 

■ Title : Low Temperature Crystallization of Si films for TFTs by Laser Annealing on Panels

 

■ Speaker : Takashi NOGUCHI  (University of the Ryukyus)


■ Date and time : 24th of November, 2017 (Fri) 14:00

 

■ Venue : Applied Engineering Dpt. Bd W1-1 Room 1318

 

■ Host  : Prof. Sang-Hee Park

 

■ Abstract : Laser Crystallizations using Blue Laser-Diodes Annealing (BLDA) as well as conventional Excimer Laser Annealing (ELA) are presented for mounting the TFTs on panels. On glass, high crystallinity of Si films can be obtained by using multi-shots ELA as well as CW laser scanning. In term of lower temperature TFT process on flexible plastic sheets, pulsed ELA of UV light is faborable. However, there are some issues after ELA. As a result of BLDA scanning for thin Si films, remarkable crystallization occurs with keeping the surface smooth not only for CVD film but also for sputtered Si film [5]. By changing the laser power of 445 nm beam, the grain size can be controlled from micro-grains to large grains as well as to anisotropic long crystal grains. For the Si films of heavily phosphorus doped condition, the resistivity decreased drastically after BLDA as well as after multi-shots ELAIn order to perform low temperature TFT process, metal source/drain (S/D)structure without using impurity doping is proposed for TFTs with low fabrication cost on panel. 

No. Subject Author Date Views
Notice 2017 The Fall Semester Seminar ADMINI 2017.09.08 2200
247 12/5 (Tue) Prof. George Crabtree (Argonne National Laboratory) ADMINI 2017.12.02 315
246 11/28 (Tue) Dr. Woo-Jin Lee (Ministry of Science and ICT.) ADMINI 2017.11.24 631
» 11/24 (Fri) Takashi NOGUCH (University of the Ryukyus) ADMINI 2017.11.23 356
244 11/21 (Tue) Dr. Young Ki Lee (ETRI) file ADMINI 2017.11.20 672
243 11/22 (Wed) Prof. Sung Hoon Kang (Johns Hopkins University) file ADMINI 2017.11.20 725
242 11/21 (Tue) Dr. Byoung Koun Min, (KIST) ADMINI 2017.11.17 955
241 11/13 (Mon) Dr. Hans Aage Hiuler (Danish Power System) ADMINI 2017.11.10 525
240 11/13 (Mon) Prof. Jens Oluf Jensen (Technical University of Denmark) ADMINI 2017.11.10 523
239 11/14 (Tue) Prof. Jae-Byum Chang (Sungkyunkwan Univ) ADMINI 2017.11.10 549
238 11/7 (Tue) Prof. Su-Mi Hur (Chonnam National University) ADMINI 2017.11.05 372
237 10/31 (Tue) Director Jang Sae Young (Samsung Electronics) ADMINI 2017.10.26 385
236 11/6 (Mon) Prof. Redouane Borsali (Grenoble Alpes University) ADMINI 2017.10.26 490
235 11/6 ~ 7 Prof. Erik Luijten (Northwestern University) file ADMINI 2017.10.25 487
234 10/23 ~ 24 Prof. Paul C. McIntyre (Stanford University) file ADMINI 2017.10.25 405
233 10/24 (Tue) Prof. Sun-Jae Kim (Sejong, Univ) ADMINI 2017.10.20 710
232 10/19 (Thu) Prof. Sang Cheol, Jung (Suncheon University) ADMINI 2017.10.18 991
231 10/10 (Tue) Dr. Joo Choi (POSCO) ADMINI 2017.09.29 1761
230 9/26 (Tue) Prof. Tae-Woo Lee (Seoul National University) ADMINI 2017.09.22 941
229 9/19 (Tue) Representative Sang Min Lee (Congressman) ADMINI 2017.09.15 1011
228 9/12 (Tue) Monika Fleischer(Eberhard Karls University Tübingen) ADMINI 2017.09.14 702